| Semiconductor - Alumina (Al2O3) |
 |
| Heating Guide
|
|
 |
| Cover Plate
|
|
 |
| Tray Cover
|
|
 |
| Top Chuck
|
|
|
| |
 |
| Vacuum Chuck
|
|
 |
| Top Nozzle Φ52
|
|
|
|
|
| |
| Semiconductor - Si & SiC |
 |
| Cathode Φ0.5x509Holes
|
|
 |
| CathodeΦ0.5x633Holes
|
|
 |
| CathodeΦ0.5x3300 Holes
|
|
 |
| Lam Cathode
|
|
|
| |
 |
| HTP Cathode
|
|
 |
| Vacuum Arm
|
|
 |
| Focus Ring
|
|
 |
| Insert Ring
|
|
|
| |
 |
| Cover Plate
|
|
 |
| SiC Stepper Chuck
|
|
|
|
|
| |
| Semiconductor - Quartz |
 |
| GDP Φ5X88Holes
|
|
 |
| Pyrex wafer
|
|
 |
| Cap Ring
|
|
 |
| Shield Ring
|
|
|
| |
 |
| Insulator
|
|
 |
| Ring
|
|
|
|
|
| |
| LED-sic |
 |
| SIC Tray
|
|
 |
| Al2O3 Tray
|
|
 |
| Suceptor
|
|
 |
| Suceptor Tray
|
|
|
