Semiconductor - Alumina (Al2O3) |
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Roller Bush 5G |
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Roller Bush 7G |
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Side Golf Tee |
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Arm 50x7.6t /Arm 215x3t |
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Arm |
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Arm |
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Gas Nozzle / Insulator |
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Pin 77.6xΦ3.73 /
Pin 77.6xΦ6.35 |
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Ring Outer1“, Inner 1" |
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Depo Ring |
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Insulator Ring |
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Ceramic Dome |
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Heating Guide |
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Cover Plate |
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Tray Cover |
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Top Chuck |
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Vacuum Chuck |
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Top Nozzle Φ52 |
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TFT/LCD - Alumina (Al2O3) |
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Inner Disk for 1st LCD |
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Bottom Plate for 1st
LCD (814x20t) |
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Shaft for
1st LCD |
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Shaft for 5th LCD |
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LCD End Effect 531x324x4.5t |
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LCD End Effect 531x324x4.5t |
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Extension Diffusion for Solar |
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Shield Lower Plate for 5th LCD (1057x90x10t) |
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Shield Lower SA & SB for 5th LCD |
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Bottom Plate for 3rd LCD
LG P P3 (590x670) |
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Semiconductor - Alumina (Al2O3) |
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Heating Guide |
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Cover Plate |
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Tray Cover |
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Top Chuck |
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Vacuum Chuck |
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Top Nozzle Φ52 |
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Semiconductor - Si & SiC |
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Cathode Φ0.5x509Holes |
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CathodeΦ0.5x633Holes |
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CathodeΦ0.5x3300 Holes |
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Lam Cathode |
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HTP Cathode |
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Vacuum Arm |
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Focus Ring |
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Insert Ring |
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Cover Plate |
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SiC Stepper Chuck |
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Semiconductor - Quartz |
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GDP Φ5X88Holes |
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Pyrex wafer |
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Cap Ring |
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Shield Ring |
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Insulator |
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Ring |
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LED-sic |
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SIC Tray |
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Al2O3 Tray |
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Suceptor |
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Suceptor Tray |
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Wafer Dicing |
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SUS Mat. Porous Chuck |
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Al2O3 Mat. Porous Chuck |
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Wafer Grinding |
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Material & Spec.
- Al2O3
- Porous Type
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Porosity adjustable
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OD 8”~ 12”
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// ,ㅁ , 0.3um |
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