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产品介绍
零部件事业部
- 氧化铝 Part
- Si, Quarts part
- Sic part
- Porus Chuck
- 其他
装备事业部
- 单用
- 多用
- 一般机械类
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其他

Semiconductor - Alumina (Al2O3)
Roller Bush 5G
Roller Bush 7G
Side Golf Tee
Arm 50x7.6t /Arm 215x3t
 
Arm
Arm
Gas Nozzle / Insulator
Pin 77.6xΦ3.73 /
Pin 77.6xΦ6.35
 
Ring Outer1“, Inner 1"
Depo Ring
Insulator Ring
Ceramic Dome
 
Heating Guide
Cover Plate
Tray Cover
Top Chuck
 
Vacuum Chuck
Top Nozzle Φ52
   
 
TFT/LCD - Alumina (Al2O3)
Inner Disk for 1st LCD
Bottom Plate for 1st
LCD (814x20t)
Shaft for
1st LCD
Shaft for 5th LCD
 
LCD End Effect 531x324x4.5t
 
LCD End Effect 531x324x4.5t
 
Extension Diffusion for Solar
 
Shield Lower Plate for 5th LCD (1057x90x10t)
Shield Lower SA & SB for 5th LCD
 
Bottom Plate for 3rd LCD LG P P3 (590x670)
 
Semiconductor - Alumina (Al2O3)
Heating Guide
Cover Plate
Tray Cover
Top Chuck
 
Vacuum Chuck
Top Nozzle Φ52
   
 
Semiconductor - Si & SiC
Cathode Φ0.5x509Holes
CathodeΦ0.5x633Holes
CathodeΦ0.5x3300 Holes
Lam Cathode
 
HTP Cathode
Vacuum Arm
Focus Ring
Insert Ring
 
Cover Plate
SiC Stepper Chuck
   
 
Semiconductor - Quartz
GDP Φ5X88Holes
Pyrex wafer
Cap Ring
Shield Ring
 
Insulator
Ring
   
 
LED-sic
SIC Tray
Al2O3 Tray
Suceptor
Suceptor Tray
 
Wafer Dicing
SUS Mat. Porous Chuck
Al2O3 Mat. Porous Chuck
   
 
Wafer Grinding
Material & Spec.
- Al2O3
- Porous Type
- Porosity adjustable
- OD 8”~ 12”
- // ,ㅁ , 0.3um