Semiconductor - Alumina (Al2O3) |
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Heating Guide |
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Cover Plate |
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Tray Cover |
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Top Chuck |
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Vacuum Chuck |
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Top Nozzle Φ52 |
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Semiconductor - Si & SiC |
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Cathode Φ0.5x509Holes |
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CathodeΦ0.5x633Holes |
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CathodeΦ0.5x3300 Holes |
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Lam Cathode |
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HTP Cathode |
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Vacuum Arm |
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Focus Ring |
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Insert Ring |
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Cover Plate |
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SiC Stepper Chuck |
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Semiconductor - Quartz |
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GDP Φ5X88Holes |
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Pyrex wafer |
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Cap Ring |
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Shield Ring |
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Insulator |
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Ring |
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LED-sic |
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SIC Tray |
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Al2O3 Tray |
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Suceptor |
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Suceptor Tray |
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